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Proceedings Paper

Innovative nano-optical devices and optical integration using nano-fabrication technologies
Author(s): Jian Jim Wang; Xuegong Deng; Lei Chen; Paul F. Sciortino; Jiandong Deng; Feng Liu; Anguel Nikolov; Alan Graham; Yonglin Huang
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Paper Abstract

We developed various optical devices and integrated optical devices based on innovative nano-optical structures and design. The nano-optical devices and integrated devices were fabricated through a nano-manufacturing platform based on wafer level nano-replication with mold and nano-pattern transfer by nano-lithography. The nano-replication process, which based on imprinting a single-layer spin-coated UV curable resist, achieved excellent nano-patterning fidelity and on-wafer uniformity with high-throughput. Excellent wafer level performance and yield were achieved. Nano-optic devices, such as, quarter wave plates and polarizers, and integrated nano-optical devices, such as monolithically integrated semi-isolators, were manufactured with the nano-manufacturing platform. The developed technology is suitable for high-throughput and low cost manufacturing needs for commercializing nano-structure based optical devices and integrated optical devices.

Paper Details

Date Published: 10 January 2005
PDF: 15 pages
Proc. SPIE 5623, Passive Components and Fiber-based Devices, (10 January 2005); doi: 10.1117/12.580102
Show Author Affiliations
Jian Jim Wang, NanoOpto Corp. (United States)
Xuegong Deng, NanoOpto Corp. (United States)
Lei Chen, NanoOpto Corp. (United States)
Paul F. Sciortino, NanoOpto Corp. (United States)
Jiandong Deng, NanoOpto Corp. (United States)
Feng Liu, NanoOpto Corp. (United States)
Anguel Nikolov, NanoOpto Corp. (United States)
Alan Graham, NanoOpto Corp. (United States)
Yonglin Huang, Integrated Photonics Inc. (United States)

Published in SPIE Proceedings Vol. 5623:
Passive Components and Fiber-based Devices
Yan Sun; Shuisheng Jian; Sang Bae Lee; Katsunari Okamoto, Editor(s)

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