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Proceedings Paper

Carbon nanotube technologies for future ULSI via interconnects
Author(s): Yuji Awano
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Paper Abstract

We demonstrate the advantages of carbon nanotubes (CNTs) for ULSI interconnections, which we believe that it must be one of the most promising applications for metallic carbon nanotubes. We report present status of CNT material technologies and the potential of metallic CNT vias for future ULSI interconnections.

Paper Details

Date Published: 25 March 2005
PDF: 8 pages
Proc. SPIE 5732, Quantum Sensing and Nanophotonic Devices II, (25 March 2005); doi: 10.1117/12.580083
Show Author Affiliations
Yuji Awano, Fujitsu Labs. Ltd. (Japan)


Published in SPIE Proceedings Vol. 5732:
Quantum Sensing and Nanophotonic Devices II
Manijeh Razeghi; Gail J. Brown, Editor(s)

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