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Proceedings Paper

Evaluation of thermal loading effects of laser Doppler vibrometer applied to micro-electro-mechanical systems (MEMS)
Author(s): Ferdinando Cannella; Barbara Marchetti
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Paper Abstract

The aim of this research is to evaluate the effect of the interaction between the Laser Doppler Vibrometer and the sample in the microscale. In particular the attention will be focused in the numerical and experimental evaluation of the heating effect due to the laser beam power. The consequent temperature variation will be related to the measurement results in terms of resonance frequencies and vibrational modes determination.

Paper Details

Date Published: 22 June 2004
PDF: 10 pages
Proc. SPIE 5503, Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 June 2004); doi: 10.1117/12.579567
Show Author Affiliations
Ferdinando Cannella, Univ. Politecnica delle Marche (Italy)
Barbara Marchetti, Univ. Politecnica delle Marche (Italy)


Published in SPIE Proceedings Vol. 5503:
Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)

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