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Proceedings Paper

Additional error sources for microscopic laser Doppler measurements
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Paper Abstract

Laser-Doppler Vibrometry has been proven to be an accurate method to measure vibration amplitudes with a known error budget. Therefore, vibrometer technique is used to realize primary standards in vibration-amplitude measurements at national metrology institutes (e.g. Physikalisch Technische Bundesanstalt PTB in Germany). However, additional error sources emerge for vibrometer measurements at microscopic structures. This paper discusses two error sources that can be neglected for usual macroscopic testing but can become important for microscopic measurements.

Paper Details

Date Published: 22 June 2004
PDF: 12 pages
Proc. SPIE 5503, Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 June 2004); doi: 10.1117/12.579565
Show Author Affiliations
Christian Rembe, Polytec GmbH (Germany)
Alexander Draebenstedt, Polytec GmbH (Germany)


Published in SPIE Proceedings Vol. 5503:
Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)

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