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Fabrication of microstructures using dry film photoresist and electroplating
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Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, ; doi: 10.1117/12.578780
Show Author Affiliations
Xue Chuan Shan, Singapore Institute of Manufacturing Technology (Singapore)
Haijing Lu, Singapore Institute of Manufacturing Technology (Singapore)


Published in SPIE Proceedings Vol. 5650:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
Jung-Chih Chiao; David N. Jamieson; Lorenzo Faraone; Andrew S. Dzurak, Editor(s)

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