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Proceedings Paper

Micro-optical instrumentation for process spectroscopy
Author(s): Richard A. Crocombe; Dale C. Flanders; Walid Atia
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Paper Abstract

Traditional laboratory ultraviolet/visible/near-infrared spectroscopy instruments are tabletop-sized pieces of equipment that exhibit very high performance, but are generally too large and costly to be widely distributed for process control applications or used as spectroscopic sensors. Utilizing a unique, and proven, micro-optical technology platform origi-nally developed, qualified and deployed in the telecommunications industry, we have developed a new class of spectro-scopic micro-instrumentation that has laboratory quality resolution and spectral range, with superior speed and robust-ness. The fundamentally lower cost and small form factor of the technology will enable widespread use in process moni-toring and control. This disruption in the ground rules of spectroscopic analysis in these processes is enabled by the re-placement of large optics and detector arrays with a high-finesse, high-speed micro electro mechanical system (MEMS) tunable filter and a single detector, that enable the manufacture of a high performance and extremely rugged spectrome-ter in the footprint of a credit card. Specific process monitoring and control applications discussed in the paper include pharmaceutical, gas sensing and chemical processing applications.

Paper Details

Date Published: 8 December 2004
PDF: 15 pages
Proc. SPIE 5591, Lab-on-a-Chip: Platforms, Devices, and Applications, (8 December 2004); doi: 10.1117/12.578107
Show Author Affiliations
Richard A. Crocombe, AXSUN Technologies (United States)
Dale C. Flanders, AXSUN Technologies (United States)
Walid Atia, AXSUN Technologies (United States)


Published in SPIE Proceedings Vol. 5591:
Lab-on-a-Chip: Platforms, Devices, and Applications
Linda A. Smith; Daniel Sobek, Editor(s)

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