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Proceedings Paper

High-speed nanometer lapping photonics elements
Author(s): Jiandong Yang; Qun Liu; Chunlin Tian
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Paper Abstract

This paper discusses some problems about nanometer lapping photonics elements. The solid abrasives high speed lapping method and the theory of lapping tool wearing uniformly are used in machining photonics elements. It makes workpiece machined surface roughness reach to Ra0.88nm, flatness reach 19nm. That not only realizes nanometer machining, but also realizes machining at high efficiency and low cost.

Paper Details

Date Published: 9 February 2005
PDF: 4 pages
Proc. SPIE 5635, Nanophotonics, Nanostructure, and Nanometrology, (9 February 2005); doi: 10.1117/12.577984
Show Author Affiliations
Jiandong Yang, Changchun Univ. of Science and Technology (China)
Qun Liu, Changchun Univ. of Science and Technology (China)
Chunlin Tian, Changchun Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 5635:
Nanophotonics, Nanostructure, and Nanometrology
Xing Zhu; Stephen Y. Chou; Yasuhiko Arakawa, Editor(s)

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