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Proceedings Paper

Properties of humidity sensors with porous Al2O3 as a dielectric layer
Author(s): Bogdan Chachulski; Grzegorz Jasinski; Teresa Zajt; Antoni Nowakowski; Piotr Jasinski
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Paper Abstract

The effect of humidity influence on characteristics of a ceramic sensor with a porous dielectric Al2O3 layer is presented. Influence of chosen electrolytic process parameters on electrical properties of the sensor is shown. The experimental data of two groups of sensors are interpreted using two, known from literature, electric equivalent circuits.

Paper Details

Date Published: 7 July 2004
PDF: 6 pages
Proc. SPIE 5505, Optical Methods, Sensors, Image Processing, and Visualization in Medicine, (7 July 2004); doi: 10.1117/12.577909
Show Author Affiliations
Bogdan Chachulski, Gdansk Univ. of Technology (Poland)
Grzegorz Jasinski, Gdansk Univ. of Technology (Poland)
Teresa Zajt, Gdansk Univ. of Technology (Poland)
Antoni Nowakowski, Gdansk Univ. of Technology (Poland)
Piotr Jasinski, Gdansk Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 5505:
Optical Methods, Sensors, Image Processing, and Visualization in Medicine
Antoni Nowakowski; Bogdan B. Kosmowski, Editor(s)

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