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Proceedings Paper

Design considerations for electrostatically tunable InP-based Fabry-Perot filters for WDM applications
Author(s): Mithilesh A. Shah; Vicknesh Shanmugan; Akkipeddi Ramam
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Paper Abstract

The use of micromachined tunable Fabry-Perot interferometers based on compound semiconductors with an integrated photodetector have earlier been proposed [1-3] for fiber optic communications employing Wavelength Division Multiplexing (WDM) for wavelengths around 1.55 μm. The variation of the Fabry-Perot cavity length in these devices is achieved by electrostatic actuation induced movements of a Distributed Bragg Reflector (DBR) mirror suspended by beams. A new filter design has been proposed and its electrostatic actuation induced deflection has been investigated along with three different filter designs using Finite Element Analysis (FEA). Using a mathematical model, deflection is analytically calculated and compared with FEA results. Due to the way in which the mirror is integrated with suspending framework of beams, bending within the mirror during actuation cannot be averted. The filter’s optical performance demands that mirror remain so flat that the maximum bending deflection is 1 nm for the mirror of given dimensions. Using a criterion based on mechanical and optical considerations the length of the beams suspending the mirror has been optimized for each of filter designs under investigation.

Paper Details

Date Published: 30 December 2004
PDF: 11 pages
Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.577776
Show Author Affiliations
Mithilesh A. Shah, Institute of Materials Research and Engineering (Singapore)
Vicknesh Shanmugan, Institute of Materials Research and Engineering (Singapore)
Akkipeddi Ramam, Institute of Materials Research and Engineering (Singapore)

Published in SPIE Proceedings Vol. 5641:
MEMS/MOEMS Technologies and Applications II
Zhichun Ma; Guofan Jin; Xuyuan Chen, Editor(s)

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