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Proceedings Paper

One-dimensional surface profile measurement with a fast scanning method by detecting angular deflection of a laser beam
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Paper Abstract

The rough surface of a aluminum cylindrical drum cut by turning tool is measured with a fast scanning method by detecting angular deflection of a laser beam. Reflection pattern from the surface extended into a large region, and contained two kinds of components of narrow and wide patterns. To detect rough surface's slope, the barycentric position of the wide pattern was measured with a PSD, and a beam diameter of 5mm on the surface was adopted. After a proportionality coefficient to convert from PSD output to the surface's slope was determined, an one-dimensional surface profile measurement of the rough surface was performed without a vibration isolator. Measurement error was estimated to be 0.27μm.

Paper Details

Date Published: 20 January 2005
PDF: 9 pages
Proc. SPIE 5633, Advanced Materials and Devices for Sensing and Imaging II, (20 January 2005); doi: 10.1117/12.577647
Show Author Affiliations
Ryo Shinozaki, Core System Co., Ltd. (Japan)
Osami Sasaki, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)


Published in SPIE Proceedings Vol. 5633:
Advanced Materials and Devices for Sensing and Imaging II
Anbo Wang; Yimo Zhang; Yukihiro Ishii, Editor(s)

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