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Proceedings Paper

Pneumatic method for making fast, higher resolution, noncontacting measurement of surface topography
Author(s): Ronald W. Woolley
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Paper Abstract

Fluid Film Devices Ltd specialises mainly in the design and manufacture of self-acting or aerodynamic gas bearings. The geometric tolerances needed for these bearings can be of the order of O.lum. It was the need for rapid, noncontacting measurement of components, often made of ceramic material, that led to the re-development of the Pneumatic Probe (PP).

Paper Details

Date Published: 1 April 1992
PDF: 11 pages
Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); doi: 10.1117/12.57764
Show Author Affiliations
Ronald W. Woolley, Fluid Film Devices Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 1573:
Commercial Applications of Precision Manufacturing at the Sub-Micron Level

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