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Proceedings Paper

Surface characterisation via optical diffraction
Author(s): Daniel I. Mansfield
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Paper Abstract

Through the consideration of a surface as a reflective phase grating, this paper establishes the various relationships between the statistical parameters of the surface topography and the far- field diffraction pattern. These relationships have been incorporated into Talyfine, a new measuring instrument designed primarily for the measurement of flats and cylinders. The performance of this instrument is compared against established stylus-based surface texture measuring instruments, Talystep and Form Talysurf.

Paper Details

Date Published: 1 April 1992
PDF: 7 pages
Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); doi: 10.1117/12.57758
Show Author Affiliations
Daniel I. Mansfield, Rank Taylor Hobson Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 1573:
Commercial Applications of Precision Manufacturing at the Sub-Micron Level

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