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Proceedings Paper

Advances in interferometric wavefront-measuring technology through the direct measuring interferometry method
Author(s): Michael F. Kuechel
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Paper Abstract

With the invention of a new phase measuring technique, 'Direct Measuring Interferometry' (DMI), almost all practical difficulties of quantitative interferometry in production environment are solved to a large extent.

Paper Details

Date Published: 1 April 1992
PDF: 4 pages
Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); doi: 10.1117/12.57757
Show Author Affiliations
Michael F. Kuechel, Carl Zeiss (Germany)


Published in SPIE Proceedings Vol. 1573:
Commercial Applications of Precision Manufacturing at the Sub-Micron Level

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