Share Email Print
cover

Proceedings Paper

Overview: sensitive techniques for surface measurement and characterization
Author(s): Jean M. Bennett
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A brief overview is given of the papers presented in the session on Measurement and Characterization. Then techniques are mentioned that are appropriate for quantifying precision manufactured surfaces at the sub-micron level. The new techniques of atomic probe microscopy and long scan profilometers are highlighted.

Paper Details

Date Published: 1 April 1992
PDF: 7 pages
Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); doi: 10.1117/12.57756
Show Author Affiliations
Jean M. Bennett, Naval Weapons Ctr. (United States)


Published in SPIE Proceedings Vol. 1573:
Commercial Applications of Precision Manufacturing at the Sub-Micron Level

© SPIE. Terms of Use
Back to Top