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Proceedings Paper

Effect of laser intensity changing on accuracy of size measurement by laser scanning
Author(s): Tao Jiang; Zhenglin Yu; Guohua Cao; Hongji Xu
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Paper Abstract

In the system of size measurement by laser scanning, the laser intensity is necessarily kept stability. But in practice, output intensity of laser is continuously attenuated as time passed, so that precision accuracy of detecting system becomes poor. The paper analyzes the effect of laser intensity changing on accuracy of size measurement by laser scanning, provides with the auto-measured circuit and the measuring methods of the output laser intensity, and the method of electrical compensation for intensity change. The method has been applied to the instrument of diameter measurement by laser scanning on line successfully, which is effective and feasible.

Paper Details

Date Published: 17 January 2005
PDF: 4 pages
Proc. SPIE 5644, Optoelectronic Devices and Integration, (17 January 2005); doi: 10.1117/12.577452
Show Author Affiliations
Tao Jiang, ChangChun Univ. of Science and Technology (China)
Zhenglin Yu, ChangChun Univ. of Science and Technology (China)
Guohua Cao, ChangChun Univ. of Science and Technology (China)
Hongji Xu, ChangChun Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 5644:
Optoelectronic Devices and Integration
Hai Ming; Xuping Zhang; Maggie Yihong Chen, Editor(s)

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