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Proceedings Paper

Computer-controlled polishing to fabricate special optics
Author(s): Volkmar Giggel; Armin Leitel
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Paper Abstract

For high-resolution optical imaging systems used in photolithography, lenses with diameters up to 200 mm and surface accuracies of about 25 nm are required. To realize an economic production of such elements, a computer-controlled polishing following classical techniques has been developed. Applications in the laboratory and production spheres are presented for components made from Zerodur, optical glasses and calcium fluoride.

Paper Details

Date Published: 1 April 1992
PDF: 6 pages
Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); doi: 10.1117/12.57739
Show Author Affiliations
Volkmar Giggel, Carl Zeiss Jena GmbH (Germany)
Armin Leitel, Carl Zeiss Jena GmbH (Germany)


Published in SPIE Proceedings Vol. 1573:
Commercial Applications of Precision Manufacturing at the Sub-Micron Level

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