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Proceedings Paper

Influence of probe tip size and incident light polarization on resolution in near-field scanning optical microscopy
Author(s): Guiying Wang; Qinghua Wu; Zhizhan Xu
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Paper Abstract

Using probe-sample interaction equations based on the dipole-self-consistent field theory, we studied influence of the probe tip size on resolution in near-field scanning optical microscopic system for different undulate protuberance size of the sample surface and distance from the probe to the sample surface. These parameters in the NSOM were all normalized by the probe tip size in our numerical calculation, consequently a new definition expression of NSOMs resolution was suggested. Furthermore we calculated and analyzed polarization influence of the incident light on the resolution. Using probe tip size to normalize another parameter in the calculation and analysis causes the some succinctness conclusions.

Paper Details

Date Published: 9 February 2005
PDF: 13 pages
Proc. SPIE 5635, Nanophotonics, Nanostructure, and Nanometrology, (9 February 2005); doi: 10.1117/12.577201
Show Author Affiliations
Guiying Wang, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Qinghua Wu, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Zhizhan Xu, Shanghai Institute of Optics and Fine Mechanics, CAS (China)


Published in SPIE Proceedings Vol. 5635:
Nanophotonics, Nanostructure, and Nanometrology
Xing Zhu; Stephen Y. Chou; Yasuhiko Arakawa, Editor(s)

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