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Proceedings Paper

Phase-shifting interferometry using an SHG blue laser diode
Author(s): Jun Chen; Yoh Tanaka; Michio Kiyohara; Motosuke Kiyohara
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Paper Abstract

A digital phase-measurement interferometer using a tunable SHG blue laser at 410nm was developed. This system enables us to test high NA lenses used in high-density optical storage devices. Excellent features such as wavelength tunability, narrow spectral linewidth, and wavelength stability, make the SHG laser very suitable as a light source for a phase-shifting interferometer working at blue-violet wavelength region. We investigated the tuning characteristic of the SHG laser as a function of DBR-section current and found that the wavelength-changing ratio was 0.0017nm/mA. An unbalanced Twyman-Green interferometer with the SHG laser was composed to measure the transmitted wavefront of an optical pickup lens with a NA of 0.85. The theory and experimental results are presented.

Paper Details

Date Published: 20 January 2005
PDF: 9 pages
Proc. SPIE 5633, Advanced Materials and Devices for Sensing and Imaging II, (20 January 2005); doi: 10.1117/12.577051
Show Author Affiliations
Jun Chen, Tokyo Polytechnic Univ. (Japan)
Yoh Tanaka, Tokyo Polytechnic Univ. (Japan)
Michio Kiyohara, Kiyohara Optics Inc. (Japan)
Motosuke Kiyohara, Kiyohara Optics Inc. (Japan)


Published in SPIE Proceedings Vol. 5633:
Advanced Materials and Devices for Sensing and Imaging II
Anbo Wang; Yimo Zhang; Yukihiro Ishii, Editor(s)

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