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Proceedings Paper

Perturbation approach for analyzing microstructures
Author(s): Tuomas Vallius
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Paper Abstract

Perturbations arising from sharp discontinuities of surface relief profiles can have significant effects on the field transmitted through diffractive structures. A method utilizing these perturbations is presented for efficient analysis of the response of surface profiles in the non-paraxial domain. Comparison with rigorous diffraction theory proves the method reliable and the numerical feasibility of the approach is much better than that of rigorous methods.

Paper Details

Date Published: 7 February 2005
PDF: 6 pages
Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); doi: 10.1117/12.577019
Show Author Affiliations
Tuomas Vallius, Univ. of Joensuu (Finland)

Published in SPIE Proceedings Vol. 5636:
Holography, Diffractive Optics, and Applications II
Yunlong Sheng; Dahsiung Hsu; Chongxiu Yu; Byoungho Lee, Editor(s)

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