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Proceedings Paper

Torsion-mirror optical actuators with compound driving structures
Author(s): Wengang Wu; Qinghua Chen; Guizhen Yan; Yilong Hao
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Paper Abstract

A new kind of torsion-mirror optical actuators with compound driving structures is reported. The advanced compound driving structures are made up of plate-electrode couple drives and vertical comb drives, and are proved experimentally to be able to actuate mirrors to achieve not only large-range continuous rotation but also 90° rotation. A set of surface-and-bulk-mixed-silicon-micromachining process has been developed to manufacture the new torsion-mirror optical actuators in SOI wafers. In the processing, the comb fingers of about 180 μm in depth are produced. A synthetic coupling-loss model for the coupling system composed of the mirrors and the input and output fiber ends is obtained when the torsion-mirror actuators are brought into use as optical switches or attenuators, etc. for fiber communication applications.

Paper Details

Date Published: 30 December 2004
PDF: 8 pages
Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.576590
Show Author Affiliations
Wengang Wu, Peking Univ. (China)
Qinghua Chen, Peking Univ. (China)
Guizhen Yan, Peking Univ. (China)
Yilong Hao, Peking Univ. (China)


Published in SPIE Proceedings Vol. 5641:
MEMS/MOEMS Technologies and Applications II
Zhichun Ma; Guofan Jin; Xuyuan Chen, Editor(s)

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