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Proceedings Paper

Improving the performance of E-beam 2nd writing in mask alignment accuracy and pattern faultless for CPL technology
Author(s): Booky Lee; Richard Hung; Orson Lin; Yuan-Hsun Wu; Makoto Kozuma; Chiang-Lin Shih; Michael Hsu; Stephen D. Hsu
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Paper Abstract

The chromeless phase lithography (CPL) is a potential technology for low k1 optical image. For the CPL technology, we can control the local transmission rate to get optimized through pitch imaging performance. The CPL use zebra pattern to manipulate the pattern local transmission as a tri-tone structure in mask manufacturing. It needs the 2nd level writing to create the zebra pattern. The zebra pattern must be small enough not to be printed out and the 2nd writing overlay accuracy must keep within 40nm. The request is a challenge to E-beam 2nd writing function. The focus of this paper is in how to improve the overlay accuracy and get a precise pattern to form accurate pattern transmission. To fulfill this work several items have been done. To check the possibility of contamination in E-Beam chamber by the conductive layer coating we monitor the particle count in the E-Beam chamber before and after the coated blank load-unload. The conductivity of our conductive layer has been checked to eliminate the charging effect by optimizing film thickness. The dimension of alignment mark has also been optimized through experimentation. And finally we checked the PR remain to ensure sufficient process window in our etching process. To verify the performance of our process we check the 3D SEM picture. Also we use AIMs to prove the resolution improvement capability in CPL compared to the traditional methods-Binary mask and Half Tone mask. The achieved overlay accuracy and process can provide promising approach for NGL reticle manufacturing of CPL technology.

Paper Details

Date Published: 27 January 2005
PDF: 8 pages
Proc. SPIE 5645, Advanced Microlithography Technologies, (27 January 2005); doi: 10.1117/12.576542
Show Author Affiliations
Booky Lee, Toppan Chunghwa Electronics Corp. (Taiwan)
Richard Hung, Nanya Technology Corp. (Taiwan)
Orson Lin, Toppan Chunghwa Electronics Corp. (Taiwan)
Yuan-Hsun Wu, Nanya Technology Corp. (Taiwan)
Makoto Kozuma, Toppan Chunghwa Electronics Corp. (Taiwan)
Chiang-Lin Shih, Nanya Technology Corp. (Taiwan)
Michael Hsu, ASML MaskTools, Inc. (United States)
Stephen D. Hsu, ASML MaskTools, Inc. (United States)


Published in SPIE Proceedings Vol. 5645:
Advanced Microlithography Technologies
Yangyuan Wang; Jun-en Yao; Christopher J. Progler, Editor(s)

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