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Proceedings Paper

Continuous micro-optics fabrication using halftone masks and proximity printing
Author(s): Chuankai Qiu; Changtao Wang; Chunlei Du; Xiaochun Dong
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Paper Abstract

It is reported in this paper a method to fabricate three dimensional continuous micro-optical structures using half tone masks and proximity printing. The frequency modulation coded half tone masks are employed to obtain the predetermined exposure distribution. Several components like Cylinder microlens arrays, phase correctors are realized in photoresists.

Paper Details

Date Published: 7 February 2005
PDF: 5 pages
Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); doi: 10.1117/12.576373
Show Author Affiliations
Chuankai Qiu, Institute of Optics and Electronics, CAS (China)
Changtao Wang, Institute of Optics and Electronics, CAS (China)
Chunlei Du, Institute of Optics and Electronics, CAS (China)
Xiaochun Dong, Institute of Optics and Electronics, CAS (China)


Published in SPIE Proceedings Vol. 5636:
Holography, Diffractive Optics, and Applications II
Yunlong Sheng; Dahsiung Hsu; Chongxiu Yu; Byoungho Lee, Editor(s)

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