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Proceedings Paper

Analysis of AFM vibrating nanotube tip imaging
Author(s): ZengWen Xiao; Xuezeng Zhao
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Paper Abstract

With the development of semiconductor technology, improving precision of linewidth measurement allows of no delay. Measured with atomic force microscope (AFM), linewidth uncertainty is affected most by its tip. The effect on linewidth measurement by vibrating tip top's track and lateral profile of carbon nanotube tip (CNT) is illuminated by simulation. The track is described by vibration model. The profile is drawn-out from the tip’s lateral image photographed by scanning electron microscope (SEM). According to the simulation results, the essential conditions that linewidth is measured with CNT are presented. Improving parameters of cantilever can decrease or eliminate the effect of track.

Paper Details

Date Published: 9 February 2005
PDF: 5 pages
Proc. SPIE 5635, Nanophotonics, Nanostructure, and Nanometrology, (9 February 2005); doi: 10.1117/12.576326
Show Author Affiliations
ZengWen Xiao, Harbin Institute of Technology (China)
Xuezeng Zhao, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 5635:
Nanophotonics, Nanostructure, and Nanometrology
Xing Zhu; Stephen Y. Chou; Yasuhiko Arakawa, Editor(s)

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