Share Email Print

Proceedings Paper

Effective design of ultra-sub-micro flying system for near-field optical storage
Author(s): Dapeng Zhao; Yuhe Li; Qingxiang Li; Yanyang Zi
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published:
Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, ; doi: 10.1117/12.576317
Show Author Affiliations
Dapeng Zhao, Tsinghua Univ. (China)
Yuhe Li, Tsinghua Univ. (China)
Qingxiang Li, Tsinghua Univ. (China)
Yanyang Zi, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 5641:
MEMS/MOEMS Technologies and Applications II
Zhichun Ma; Guofan Jin; Xuyuan Chen, Editor(s)

© SPIE. Terms of Use
Back to Top