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Proceedings Paper

Effective design of ultra-sub-micro flying system for near-field optical storage
Author(s): Dapeng Zhao; Yuhe Li; Qingxiang Li; Yanyang Zi
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Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, ; doi: 10.1117/12.576317
Show Author Affiliations
Dapeng Zhao, Tsinghua Univ. (China)
Yuhe Li, Tsinghua Univ. (China)
Qingxiang Li, Tsinghua Univ. (China)
Yanyang Zi, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 5641:
MEMS/MOEMS Technologies and Applications II
Zhichun Ma; Guofan Jin; Xuyuan Chen, Editor(s)

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