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Proceedings Paper

A horizontal atomic force microscope and its applications
Author(s): Haijun Zhang; Dongxian Zhang; Yang Shi
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Paper Abstract

A new type of horizontal atomic force microscope (AFM) is developed for applications in nanotechnology. This article provides the basic principle and setup of the horizontal AFM. The light pressure of laser and the gravity exerting on the micro-cantilever was first conducted, conceiving a method to remove the effects of these factors on the interaction mechanism of atomic force and the performance of AFM. It has a horizontally designed probe unit and owns a particular path of optical beam deflection method for the measurement of cantilever’s displacement with its minimized structure. For the purpose of precise and effective imaging for different samples, we introduced a novel method to adjust the setpoint of imaging force and provided the calculative formula. A new feedback controlling theory and method of horizontal AFM was also advanced in order to develop an effective, steady and optimum feedback controlling system. Experiments show that the horizontal AFM is of high repeatability, reliable stability and ideal contrast for image acquisition. The horizontal and vertical resolutions of the system are 3 nm and 1 nm, respectively, with a maximum scan range of 10 mm´ 10 mm. These remarkable characteristics enable the AFM system to be widely applied in the fields of nanotechnology.

Paper Details

Date Published: 9 February 2005
PDF: 10 pages
Proc. SPIE 5635, Nanophotonics, Nanostructure, and Nanometrology, (9 February 2005); doi: 10.1117/12.576189
Show Author Affiliations
Haijun Zhang, Zhejiang Univ. (China)
Dongxian Zhang, Zhejiang Univ. (China)
Yang Shi, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 5635:
Nanophotonics, Nanostructure, and Nanometrology
Xing Zhu; Stephen Y. Chou; Yasuhiko Arakawa, Editor(s)

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