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Proceedings Paper

Data-processing method of white-light differential interference based on wavelet transform
Author(s): Yongjun Nie; Huimin Yan; Yanli Du; Yong Wu; Xiaoqiang Yao; Baixuan Shi
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Paper Abstract

A thickness measurement system of ultra-thin metal foils using differential white light interference has been investigated, where a data processing scheme, using wavelet transform has been carried out. The analysis of simulation result indicates that this method has high accuracy and can be applied in the course of actual measurement.

Paper Details

Date Published: 10 February 2005
PDF: 8 pages
Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); doi: 10.1117/12.576113
Show Author Affiliations
Yongjun Nie, Zhejiang Univ. (China)
Huimin Yan, Zhejiang Univ. (China)
Yanli Du, Zhejiang Univ. (China)
Yong Wu, Zhejiang Univ. (China)
Xiaoqiang Yao, Zhejiang Univ. (China)
Baixuan Shi, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 5638:
Optical Design and Testing II
Yongtian Wang; Zhicheng Weng; Shenghua Ye; Jose M. Sasian, Editor(s)

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