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Proceedings Paper

LCD-based low spatial coherence interferometer
Author(s): Zhihui Duan; Pavel Pavlicek; Yoko Miyamoto; Mitsuo Takeda
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Paper Abstract

An interferometer based on the spatial coherence detection has been developed for absolute height measurement. The location of a coherence peak resulting from the illumination of an extended quasi-monochromatic spatially incoherent light source with zone-plate-like spatial structure gives the longitudinal depth information. Besides simplifying the control of the light source structure, LCD-SLM eliminates the mechanical movement. Experiments of step height detection and profilometry of an object with a rough surface are presented that demonstrate the validity of the principle.

Paper Details

Date Published: 7 February 2005
PDF: 6 pages
Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); doi: 10.1117/12.576101
Show Author Affiliations
Zhihui Duan, Univ. of Electro-Communications (Japan)
Pavel Pavlicek, Palacky Univ., Olomouc (Czech Republic)
Institute of Physics (Czech Republic)
Yoko Miyamoto, Univ. of Electro-Communications (Japan)
Mitsuo Takeda, Univ. of Electro-Communications (Japan)

Published in SPIE Proceedings Vol. 5636:
Holography, Diffractive Optics, and Applications II
Yunlong Sheng; Dahsiung Hsu; Chongxiu Yu; Byoungho Lee, Editor(s)

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