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Proceedings Paper

Mirror-integrated arrayed-waveguide grating on silicon-on-insulator
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Paper Abstract

In this paper we design and fabricate the first mirror-integrated silicon-on-insulator-based (SOI-based) arrayed-waveguide grating (AWG) with working functions. The fabricated AWG has a channel spacing of 1.6 nm centered at 1556 nm. We substitute the bent waveguides array in the traditional AWG configuration by adopting the structure of the mirror-integrated straight waveguides. Theoretical advantages of the new structure are demonstrated. Detailed description of the design procedure and the fabrication process is provided. Test results of both the traditional AWG and this design are delineated and analyzed, which shows that the total length of the waveguide array is reduced from 3.14 cm to 2.53 cm, and the holistic structure also becomes more compact. The crosstalk of the fabricated 1x8 AWG is better than -20 dB. The typical on-chip insertion loss is about 10 dB. Losses caused by the mirrors and the waveguides transmission are about 4.2 dB, both of which resulted from the imprecision in the fabrication process.

Paper Details

Date Published: 10 January 2005
PDF: 8 pages
Proc. SPIE 5623, Passive Components and Fiber-based Devices, (10 January 2005); doi: 10.1117/12.576059
Show Author Affiliations
Kemiao Jia, Zhejiang Univ. (China)
Wenhui Wang, Shanghai Institute of Microsystem and Information Technology (China)
Yanzhe Tang, Zhejiang Univ. (China)
Yirong Yang, Shanghai Institute of Microsystem and Information Technology (China)
Jianyi Yang, Zhejiang Univ. (China)
Shanghai Institute of Microsystem and Information Technology (China)
Xiaoqing Jiang, Zhejiang Univ. (China)
Yaming Wu, Shanghai Institute of Microsystem and Information Technology (China)
Minghua Wang, Zhejiang Univ. (China)
Yuelin Wang, Zhejiang Univ. (China)
Shanghai Institute of Microsystem and Information Technology (China)


Published in SPIE Proceedings Vol. 5623:
Passive Components and Fiber-based Devices
Yan Sun; Shuisheng Jian; Sang Bae Lee; Katsunari Okamoto, Editor(s)

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