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Proceedings Paper

Noncontact thickness measurement of metal foil by means of differential white light interferometry
Author(s): Yanli Du; Huimin Yan; Yong Wu; Xiaoqiang Yao; Yongjun Nie; Baixuan Shi
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Paper Abstract

A new differential white light interference technique for the thickness measurement of metal foil is presented. In this work, the differential white light system consists of two Michelson Interferometers (MI) in tandem, of which reflective surfaces measured are corresponding surfaces of metal foil. Therefore, the measured result only relates to the thickness but not to the position of metal foil. The method is non-contact, non-destructive, has advantage of high accuracy, fast detection and compact structure. Theoretical analysis and preliminary experimental results have shown that the technique can measure the thickness of foil in the range of 1 μm to 80 μm with satisfactory accuracy and repeatability.

Paper Details

Date Published: 10 February 2005
PDF: 8 pages
Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); doi: 10.1117/12.576056
Show Author Affiliations
Yanli Du, Zhejiang Univ. (China)
Huimin Yan, Zhejiang Univ. (China)
Yong Wu, Zhejiang Univ. (China)
Xiaoqiang Yao, Zhejiang Univ. (China)
Yongjun Nie, Zhejiang Univ. (China)
Baixuan Shi, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 5638:
Optical Design and Testing II
Yongtian Wang; Zhicheng Weng; Shenghua Ye; Jose M. Sasian, Editor(s)

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