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Proceedings Paper

Study on the characteristics of multilayer dielectric grating mask profile by the RCW method
Author(s): Hua Wan; Xin-rong Chen; Jian-hong Wu
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Paper Abstract

The fabrication of multilayer dielectric gratings was theoretically and experimentally investigated. The RCW (rigorous coupled-wave) method was adopted to theoretically analyze the influence, which is caused by the gratings profile and multilayer dielectric stack, on the diffraction efficiency. Researches on detecting principle and methods of the multilayer dielectric gratings were also tried to be carried out here. The spectral distributing of the zero order diffraction efficiency was used to judge the gratings profile, basing on the theoretical research and the calculating results by the RCW method. Detecting experiments have been conducted to compare the theoretical analyses; the results of this comparison may be helpful to instruct the detection of the gratings profile.

Paper Details

Date Published: 7 February 2005
PDF: 8 pages
Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); doi: 10.1117/12.575979
Show Author Affiliations
Hua Wan, Suzhou Univ. (China)
Xin-rong Chen, Suzhou Univ. (China)
Jian-hong Wu, Suzhou Univ. (China)

Published in SPIE Proceedings Vol. 5636:
Holography, Diffractive Optics, and Applications II
Yunlong Sheng; Dahsiung Hsu; Chongxiu Yu; Byoungho Lee, Editor(s)

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