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Proceedings Paper

Parallel valveless micropump with two flexible diaphragms
Author(s): Yufeng Su; Wenyuan Chen; Feng Cui; Weiping Zhang
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Paper Abstract

This paper presents a parallel dynamic passive valveless micropump, which consists of three layers-valve, diaphragm and electromagnetic coil. The valve is wetly etched in a silicon wafer, the diaphragm is a PDMS (polydimethyl siloxane) film spun on a silicon wafer with embedded permanent magnet posts, and the coil is electroplated on a silicon substrate. Under the actuation of the magnetic field of the coil, the flexible diaphragm can be displaced upwards and downwards. After analyzing magnetic and mechanical characteristic of the flexible membrane and direction-dependence of the diffuser, this paper designed a micropump. And the relative length (L/d) of the micropump’s diffuser is 4.An 7×7 array of permanent magnetic posts is embedded in the PDMS film. Two diaphragms work in an anti-step mode, which can relieve the liquid shock and increase the discharge of the micropump. ANSYS® and Matlab® are adopted to analyze the actuation effect of the coil and the flow characteristic of the micropump. Results show that when actuated under a 0.3A, 100Hz current ,the displacement of the diaphragm is more than 30μm, and the discharge of the micropump is about 6μL/s.

Paper Details

Date Published: 30 December 2004
PDF: 7 pages
Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.575835
Show Author Affiliations
Yufeng Su, Shanghai Jiaotong Univ. (China)
Wenyuan Chen, Shanghai Jiaotong Univ. (China)
Feng Cui, Shanghai Jiaotong Univ. (China)
Weiping Zhang, Shanghai Jiaotong Univ. (China)

Published in SPIE Proceedings Vol. 5641:
MEMS/MOEMS Technologies and Applications II
Zhichun Ma; Guofan Jin; Xuyuan Chen, Editor(s)

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