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Proceedings Paper

The system on positioning detecting plasma fluorescence spectrum in reaction chamber
Author(s): Zhenjiang He; Guanling Yang; Zuohua Huang; Linhai Huang; Xiaoju Gu
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Paper Abstract

The real-time detection of plasma fluorescence spectrum in reaction chamber is significant for optimizing running parameters of the plasma syntonization enhanced system and finding sample reaction state. This paper present the new type detection system of fluorescence spectrum. This system applies a principle of control light beam transmitting by entrance pupil and viewing field, and rotated method of optical tube. It can monitor fluorescence spectrum of pointed position in reaction chamber. Some designed essentials about plan of detection range, position optical path and optical path of detecting plasma fluorescence spectrum in the system are introduced in detail. The system features are that it can aim at pointed positions of big luminophor and measure spectrum. It especially suit to real-time detect for plasma states in range nearly substrate holder. This system can applied in PECVD and some research as Chemiluminescence reaction chamber.

Paper Details

Date Published: 10 February 2005
PDF: 8 pages
Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); doi: 10.1117/12.575749
Show Author Affiliations
Zhenjiang He, South China Normal Univ. (China)
Guanling Yang, South China Normal Univ. (China)
Zuohua Huang, South China Normal Univ. (China)
Linhai Huang, South China Normal Univ. (China)
Xiaoju Gu, South China Normal Univ. (China)

Published in SPIE Proceedings Vol. 5638:
Optical Design and Testing II
Yongtian Wang; Zhicheng Weng; Shenghua Ye; Jose M. Sasian, Editor(s)

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