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Proceedings Paper

Study on MEMS optical measurement system
Author(s): Changlin Leng; Guoxiong Zhang; Fusheng Yu; Chenzhi Jiang; Ying Zhong
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Paper Abstract

A optical measurement system of Micro-electro-mechanical system (MEMS) motion is demonstrated to increase the efficiency of MEMS design and manufacturing. The system is developed based on the heterodyne laser Doppler technology, and frequency shift of 40MHz is introduced by a Bragg cell. The paper introduced MEMS vibration theory, designed optical structure and electronic circuit, and obtained the linear relation between the Doppler shift and the target velocity. Experiments on driving and measuring double-ended tuning fork resonator were carried out. The resonator is driven by using electrostatic force at its natural frequency 2.4KHz. Experimental results indicate that the measure system can be used to measure MEMS motion with high accuracy.

Paper Details

Date Published: 11 February 2005
PDF: 8 pages
Proc. SPIE 5625, Optical Transmission, Switching, and Subsystems II, (11 February 2005); doi: 10.1117/12.575290
Show Author Affiliations
Changlin Leng, Tianjin Univ. (China)
Guoxiong Zhang, Tianjin Univ. (China)
Fusheng Yu, Tianjin Univ. (China)
Shandong Institute of Architecture and Engineering (China)
Chenzhi Jiang, Tianjin Univ. (China)
Ying Zhong, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 5625:
Optical Transmission, Switching, and Subsystems II
Cedric F. Lam; Wanyi Gu; Norbert Hanik; Kimio Oguchi, Editor(s)

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