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Proceedings Paper

A method for displacement measurement based on reciprocal interferometry with spectrum analysis techniques
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Paper Abstract

A nanometer range displacement measurement system is presented where a reciprocal interferometer is employed whose configuration is similar to Michelson interferometer. Although the reciprocal interferometer is very simple and insensitive to environmental perturbations, we concluded that the spectrum analysis techniques could also be used to process the interference fringes and increase the measurement precision of reciprocal interferometry. Fast-Fourier transform and filter are used to eliminate the noises in fringes. The reconstructed fringes are very clear, which location can be measured accurately. Theoretical analysis is presented. Experimentally, the displacement of a nanopositioner-driven target was measured by using a reciprocal interferometer, a CCD camera, picture card and computer. The system has demonstrated a minimum resolution is 1.5 nm when the number of sample point is 512.

Paper Details

Date Published: 14 February 2005
PDF: 9 pages
Proc. SPIE 5634, Advanced Sensor Systems and Applications II, (14 February 2005); doi: 10.1117/12.575198
Show Author Affiliations
Yutian Wang, Yanshan Univ. (China)
Yuyan Zhang, Yanshan Univ. (China)
Peiguo Hou, Yanshan Univ. (China)
Longjiang Zheng, Yanshan Univ. (China)

Published in SPIE Proceedings Vol. 5634:
Advanced Sensor Systems and Applications II
Yun-Jiang Rao; Osuk Y. Kwon; Gang-Ding Peng, Editor(s)

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