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Proceedings Paper

Practical applications of femtosecond laser micromachining and fabrication
Author(s): Xiao Yuan; Changhong Zhu; Xiao Zhu; Guangzhi Zhu; Li Liu; Peixiang Lu
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Paper Abstract

Femtosecond laser is suitable to machine a variety of materials, such as metals, semiconductors, polymers, oxide ceramics, silica aerogels, optical glasses, crystals, deep sea sands and even explosives because of its high peak power density and low heat affected zone. In this paper, the femtosecond laser micromachining of different materials and for different processing is presented, including structuring in optical glasses, and the cutting of metals and the deep-sea (South China Sea) sands. The laser used in the experiment is a commercial Ti:Sapphire laser with the pulse width of 50 and 100 fs, wavelength of 800 nm, maximum pulse energy up to 2 mJ and the repetition rate of 1 kHz. The evolution of material eruption as a function of the number of laser pulses and intensity is studied. The dependence of ablation rate with laser intensity and the number of the pulses is characterized by measuring the maximum laser penetration depth in different materials.

Paper Details

Date Published: 13 January 2005
PDF: 7 pages
Proc. SPIE 5629, Lasers in Material Processing and Manufacturing II, (13 January 2005); doi: 10.1117/12.574982
Show Author Affiliations
Xiao Yuan, Huazhong Univ. of Science and Technology (China)
Changhong Zhu, Huazhong Univ. of Science and Technology (China)
Xiao Zhu, Huazhong Univ. of Science and Technology (China)
Guangzhi Zhu, Huazhong Univ. of Science and Technology (China)
Li Liu, Huazhong Univ. of Science and Technology (China)
Peixiang Lu, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 5629:
Lasers in Material Processing and Manufacturing II
ShuShen Deng; Akira Matsunawa; Y. Lawrence Yao; Minlin Zhong, Editor(s)

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