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Proceedings Paper

Research of the laser cleaning technique based on opto-acoustic effect
Author(s): Yuanqing Huang; Limiao Zhu; Lei Wang; Jinghua Zeng; Yuhong Qin; Hui Lin; Tianlin Hu; Chunhua Chen
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Paper Abstract

In this paper, the contaminants on the substrate surfaces are cleaned using Q-switched pulse laser irradiation, which with pulse duration typically about 20ns and wavelength typically in the 1064nm or 532nm. A new mechanism for laser cleaning is proposed, which based on opto-acoustic effect that breakdown of the air above the target is obtained by a laser beam, and a laser-induced shock wave is produced to remove the various pollutants on the solid substrate surfaces. This method is much more effective than traditional conservative cleaning techniques including the continuous wave laser cleaning, there are many advantages for this new laser cleaning technology, such as the dry treatment, non-contact, non-damage to the substrate, no environmental pollution, and energy-economic, and so on. We make the theoretical analysis for this physical model of cleaning contaminant in detail and provided some experimental results and photographs.

Paper Details

Date Published: 11 January 2005
PDF: 9 pages
Proc. SPIE 5642, Information Optics and Photonics Technology, (11 January 2005); doi: 10.1117/12.574751
Show Author Affiliations
Yuanqing Huang, Xiamen Univ. (China)
Limiao Zhu, Xiamen Univ. (China)
Lei Wang, Xiamen Univ. (China)
Jinghua Zeng, Xiamen Univ. (China)
Yuhong Qin, Xiamen Univ. (China)
Hui Lin, Xiamen Univ. (China)
Tianlin Hu, Xiamen Univ. (China)
Chunhua Chen, Xiamen Univ. (China)

Published in SPIE Proceedings Vol. 5642:
Information Optics and Photonics Technology
Guoguang Mu; Francis T. S. Yu; Suganda Jutamulia, Editor(s)

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