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Proceedings Paper

Microfabrication technology by femtosecond laser direct scanning using two-photon photo-polymerization
Author(s): Ming Zhou; Li-Peng Liu; Qi-Xun Dai; Chuan-Peng Pan
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Paper Abstract

Two-photon absorption (TPA) is confined at the focus under tight-focusing conditions, which provides a novel concept for micro-fabrication using two-photon photo-polymerization in resin. The development of three-dimensional micro-fabrication by femtosecond laser was introduced at first, then the merits of femtosecond two-photon photo-polymerization was expatiated. Femtosecond laser direct scanning three-dimensional (3D) micro-fabrication system was set up and corresponding controlling software was developed. We demonstrated a fabrication of three-dimensional microstructures using photo-polymerization of resin by two-photon absorption. The precision of micro-machining and the spatial resolution reached 1um because of TPA. The dependence of fabricated line width to the micro-fabrication speed was investigated. Benzene ring, CHINA and layer-by-layer of log structures were fabricated in this 3D- micro-fabrication system as examples.

Paper Details

Date Published: 27 January 2005
PDF: 8 pages
Proc. SPIE 5645, Advanced Microlithography Technologies, (27 January 2005); doi: 10.1117/12.574589
Show Author Affiliations
Ming Zhou, Jiangsu Univ. (China)
Li-Peng Liu, Jiangsu Univ. (China)
Qi-Xun Dai, Jiangsu Univ. (China)
Chuan-Peng Pan, Jiangsu Univ. (China)

Published in SPIE Proceedings Vol. 5645:
Advanced Microlithography Technologies
Yangyuan Wang; Jun-en Yao; Christopher J. Progler, Editor(s)

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