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Proceedings Paper

Electromagnetic MEMs eight-channel variable optical attenuator array
Author(s): Xuhan Dai; Xiaolin Zhao; Guifu Ding; Bingchu Cai
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Paper Abstract

An eight-channel variable optical attenuator (VOA) array fabricated by MEMS technology is presented. Based on micro electromagnetic actuation, the attenuation level is adjusted by changing the radial offset between the input/output optical fiber. The relationship between the attenuation and the offset was analyzed based on wave-guide transmission theory. The structure parameter was determined through mechanics and magnetic circuit analysis. The device was fabricated and packaged by micromachining technology. The packaged volume of the device is 80×40×12mm3. According to the experiment results, the insertion loss is less than 1dB, the polarization dependent loss is less than 0.1dB, dynamic range is above 35dB and the driving voltage is less than 5V. It is proved to be a low cost, high performance passive device for future all-optical-networks.

Paper Details

Date Published: 30 December 2004
PDF: 6 pages
Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.574536
Show Author Affiliations
Xuhan Dai, Shanghai Jiaotong Univ. (China)
Xiaolin Zhao, Shanghai Jiaotong Univ. (China)
Guifu Ding, Shanghai Jiaotong Univ. (China)
Bingchu Cai, Shanghai Jiaotong Univ. (China)


Published in SPIE Proceedings Vol. 5641:
MEMS/MOEMS Technologies and Applications II
Zhichun Ma; Guofan Jin; Xuyuan Chen, Editor(s)

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