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Proceedings Paper

Finite element simulation for a micro-machined cantilever optical switch
Author(s): Ying Wang; Mudi Xiong; Tong Li
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Paper Abstract

In this paper, the principle of a cantilever-beam micro-mechanical switch with SiO2 optical waveguide on silicon is described, and the solid model of the switch is established and finite element method (FEM) is used in studying its dynamic characteristics. Under different parameters, the modal characteristics are simulated and analyzed. The influence of the switch structural dimension on the resonant frequency and dynamic characteristics of the switch are investigated, and the harmonic response of the micro-mechanical optical switch is achieved. The results of analysis offers reliable basis for the structure design of the micro-machined cantilever optical switch.

Paper Details

Date Published: 11 February 2005
PDF: 5 pages
Proc. SPIE 5625, Optical Transmission, Switching, and Subsystems II, (11 February 2005); doi: 10.1117/12.574216
Show Author Affiliations
Ying Wang, Dalian Maritime Univ. (China)
Mudi Xiong, Dalian Maritime Univ. (China)
Tong Li, Northwest College for Electric Power Staff Members (China)

Published in SPIE Proceedings Vol. 5625:
Optical Transmission, Switching, and Subsystems II
Cedric F. Lam; Wanyi Gu; Norbert Hanik; Kimio Oguchi, Editor(s)

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