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Proceedings Paper

Designing the drive scheme of the silicon-based MEMS torsion-mirror optical switch
Author(s): Dongqing Yin; Jinhui Lin; Qinghua Chen; Zhangyuan Chen; Anshi Xu; Wengang Wu
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Paper Abstract

A novel driving scheme utilizing the resonance effect of the micro-mirror is presented to reduce the drive voltage of the silicon-based MEMS (microelectromechanical systems) torsion-mirror optical switch. A mixed bias of DC (direct current) and AC (alternating current) is adopted to drive the torsion mirror. Both the numerical simulation and experiment results show that the driving voltage of the optical switch is reduced by nearly 50%, from more than 270V to 130V.

Paper Details

Date Published: 31 January 2005
PDF: 6 pages
Proc. SPIE 5624, Semiconductor and Organic Optoelectronic Materials and Devices, (31 January 2005); doi: 10.1117/12.574098
Show Author Affiliations
Dongqing Yin, Peking Univ. (China)
Jinhui Lin, Peking Univ. (China)
Qinghua Chen, Peking Univ. (China)
Zhangyuan Chen, Peking Univ. (China)
Anshi Xu, Peking Univ. (China)
Wengang Wu, Peking Univ. (China)


Published in SPIE Proceedings Vol. 5624:
Semiconductor and Organic Optoelectronic Materials and Devices
Chung-En Zah; Yi Luo; Shinji Tsuji, Editor(s)

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