Share Email Print

Proceedings Paper

Adaptive CD APC with dose, focus, and thin film thickness
Author(s): Ziqiang John Mao
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published:
Proc. SPIE 5645, Advanced Microlithography Technologies, ; doi: 10.1117/12.573931
Show Author Affiliations
Ziqiang John Mao, Intel Corp. (United States)

Published in SPIE Proceedings Vol. 5645:
Advanced Microlithography Technologies
Yangyuan Wang; Jun-en Yao; Christopher J. Progler, Editor(s)

© SPIE. Terms of Use
Back to Top