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Proceedings Paper

Fabrication of chalcogenide glass waveguide for IR evanescent wave sensors
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Paper Abstract

Thin film multi-layered chalcogenide glass waveguide structures have been fabricated for evanescent wave sensing of bio toxins and other applications. Thin films of Ge containing chalcogenides have been deposited onto Si substrates, with a-GeSe2 as the cladding layer and a-GeSbSe as the core layer to form the slab waveguide. Channel waveguides have been written in the slab waveguides by appropriate light the through a mask. The photo-induced structural changes in the core layer selectively enhance refractive index at the portions of interest and thus confining the light to the channels. The waveguides have been characterized and tested for the guiding of light.

Paper Details

Date Published: 29 December 2004
PDF: 6 pages
Proc. SPIE 5593, Nanosensing: Materials and Devices, (29 December 2004); doi: 10.1117/12.573900
Show Author Affiliations
Ashtosh Ganjoo, Lehigh Univ. (United States)
Himanshu Jain, Lehigh Univ. (United States)
Joseph V. Ryan, The Pennsylvania State Univ. (United States)
Renbo Song, Lehigh Univ. (United States)
Rima Chanda, The Pennsylvania State Univ. (United States)
Joseph Irudayaraj, The Pennsylvania State Univ. (United States)
Yujie Ding, Lehigh Univ. (United States)
Carlo G. Pantano, The Pennsylvania State Univ. (United States)

Published in SPIE Proceedings Vol. 5593:
Nanosensing: Materials and Devices
M. Saif Islam; Achyut K. Dutta, Editor(s)

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