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Proceedings Paper

A new method to determine the energy range for the FOCAL technique
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Paper Abstract

An effective and simple method to determine the energy range of FOCAL is described in this paper. Relationship between the chop line width and defocus is analyzed. Simulated curves of the chop line width versus defocus are obtained by PROLITH. By choosing the curves which satisfy certain conditions, the energy range of FOCAL is determined off line. Independent of the lithographic tool, the method is time-saving and effective. The influences of some process factors, e.g. resist thickness, PEB temperature, PEB time and development time, on the energy range of FOCAL are analyzed.

Paper Details

Date Published: 27 January 2005
PDF: 8 pages
Proc. SPIE 5645, Advanced Microlithography Technologies, (27 January 2005); doi: 10.1117/12.573815
Show Author Affiliations
Dongqing Zhang, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Xiangzhao Wang, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Weijie Shi, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Fan Wang, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Liping Guo, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Jianming Hu, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Mingying Ma, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Le He, Shanghai Institute of Optics and Fine Mechanics, CAS (China)


Published in SPIE Proceedings Vol. 5645:
Advanced Microlithography Technologies
Yangyuan Wang; Jun-en Yao; Christopher J. Progler, Editor(s)

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