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Proceedings Paper

Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm
Author(s): Ming Li; Ming Wang; Tinting Wang; Hua Rong; Xuxing Chen
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Paper Abstract

An optical MEMS pressure sensor based on multi-layer circular diaphragm has been analyzed by utilizing the shell theory and characteristic matrix methods. Finite element methods are used to analyze the deflection of circular diaphragm with the residual stress effect considered. Simulation results are given by using FEM software tools ANSYS. The analytic expressions for the absolute reflectance of multi-layer circular diaphragm structure are derived. The results are valid for the most optical MEMS pressure sensors based on Fabry-Perot interferometer.

Paper Details

Date Published: 30 December 2004
PDF: 8 pages
Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.573685
Show Author Affiliations
Ming Li, Nanjing Normal Univ. (China)
Ming Wang, Nanjing Normal Univ. (China)
Tinting Wang, Nanjing Normal Univ. (China)
Hua Rong, Nanjing Normal Univ. (China)
Xuxing Chen, Nanjing Normal Univ. (China)


Published in SPIE Proceedings Vol. 5641:
MEMS/MOEMS Technologies and Applications II
Zhichun Ma; Guofan Jin; Xuyuan Chen, Editor(s)

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