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Proceedings Paper

Structure design of Si-based M-Z interference acceleration seismic geophone
Author(s): Bo Wu; Caihe Chen; Xiaoling Zhang; Yuming Cui; Guangpeng Ma; Yanjun Zhang; Juanjuan Zhong
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Paper Abstract

A novel Si-based MOEMS acceleration seismic geophone, based on M-Z interferometry, is present in this paper. In one silicon chip, several elements including four silicon beams,seismic mass, a polarizer, M-Z waveguide interferometer and acousto-optic phase modulator are integrated. The working principle and the optimization structure design of the acceleration seismic geophone are given. The simulation result performed in FEM software ANSYS agrees with the theoretical analysis well. The main design parameters of the geophone system is as following: resonance frequency: 1353 Hz; phase detection sensitivity ΔΦ/a: 1.2×10-4rad/m/s2.

Paper Details

Date Published: 30 December 2004
PDF: 7 pages
Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.573534
Show Author Affiliations
Bo Wu, Tianjin Univ. (China)
Caihe Chen, Tianjin Univ. (China)
Xiaoling Zhang, Tianjin Univ. (China)
Yuming Cui, Tianjin Univ. (China)
Guangpeng Ma, Tianjin Univ. (China)
Yanjun Zhang, Tianjin Univ. (China)
Juanjuan Zhong, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 5641:
MEMS/MOEMS Technologies and Applications II
Zhichun Ma; Guofan Jin; Xuyuan Chen, Editor(s)

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