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Proceedings Paper

Design and fabrication of two-dimensional nonseparable Dammann gratings
Author(s): Changtao Wang; Chunlei Du; Li Pan; Qiang Liu
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Paper Abstract

It is presented in this paper an improved simulated annealing algorithm with the ability of increasing sampling resolution and generating grating pattern with smoothed borders to design two-dimensional (2-D) non-separable Damann grating. Numerical simulations are performed for the lateral fabrication error accompanied in the lithography procedure and the measured experimental results of the fabricated grating agree with the simulation.

Paper Details

Date Published: 7 February 2005
PDF: 8 pages
Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); doi: 10.1117/12.573262
Show Author Affiliations
Changtao Wang, Institute of Optics and Electronics, CAS (China)
Chunlei Du, Institute of Optics and Electronics, CAS (China)
Li Pan, Institute of Optics and Electronics, CAS (China)
Qiang Liu, Institute of Optics and Electronics, CAS (China)


Published in SPIE Proceedings Vol. 5636:
Holography, Diffractive Optics, and Applications II
Yunlong Sheng; Dahsiung Hsu; Chongxiu Yu; Byoungho Lee, Editor(s)

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