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Proceedings Paper

Progress in large-range and nanoscale micromotion stage
Author(s): Benyong Chen; Junru Wang; Yong Lei
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Paper Abstract

The recent progress in large-range and nanoscale micromotion stages is summarized, and a novel magnetic levitation stage that can provide large range motion with nanometer positioning accuracy is proposed in this paper. The construction, dynamics analysis, measurement system, and control strategy of this stage are presented and discussed.

Paper Details

Date Published: 30 December 2004
PDF: 6 pages
Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.572897
Show Author Affiliations
Benyong Chen, Zhejiang Institute of Science and Technology (China)
Junru Wang, Zhejiang Institute of Science and Technology (China)
Yong Lei, Zhejiang Institute of Science and Technology (China)


Published in SPIE Proceedings Vol. 5641:
MEMS/MOEMS Technologies and Applications II
Zhichun Ma; Guofan Jin; Xuyuan Chen, Editor(s)

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