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Proceedings Paper

Minimal area of average height parameter for surface microtopography measurement
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Paper Abstract

For describing the micro-topography of a measured surface reasonably, this paper puts forward a parameter named minimal area of average height of the surface micro-topography based on the least square method, which is different from the qualitative uniformity surface parameters such as correlation theory, power spectral analysis, profile matrix spectrum and surface matrix spectrum. That means to look for the minimal size square which could represent the average height value of the sample area. If the deviation between the mean height values in this area and in the sample area is ±5% which is ±2σ of Gaussian distribution, and at the same time the ratio between the minimal area and the sample area is less than 0.8, then the measurement data from the sample area is considered as the characteristic of the measured surface micro-topography. Some standard samples finished by lapping grinding, surface grinding, planning, and end milling and plain milling are measured by using phase-shift Michelson and micro-grating-projection method in this paper. The two measurement principles are given in this paper. The Ra value of the standard samples measured and the measurement results of the minimal area of average height are given. The results shown that the parameter of minimal area of average height exist good consistency with the parameter of Ra.

Paper Details

Date Published: 27 January 2005
PDF: 8 pages
Proc. SPIE 5645, Advanced Microlithography Technologies, (27 January 2005); doi: 10.1117/12.572850
Show Author Affiliations
Fusheng Yu, Shandong Institute of Architecture and Engineering (China)
Xiaoqin Shen, Shandong Institute of Architecture and Engineering (China)
Changlin Leng, Tianjin Univ. (China)


Published in SPIE Proceedings Vol. 5645:
Advanced Microlithography Technologies
Yangyuan Wang; Jun-en Yao; Christopher J. Progler, Editor(s)

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