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Proceedings Paper

An instrument for surface roughness measurement of optical thin films
Author(s): Haihong Hou; Kui Yi; Jianda Shao; Zhengxiu Fan
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Paper Abstract

A total integrated scattering (TIS) instrument is presented. Its basic structure, theory foundation, and measurement principle are introduced. The surface root mean square (rms) roughness of single silver films on BK7 glass substrates is measured by employing this instrument. The results agree well with the data obtained by the optical profilometer and the atomic force microscope (AFM).

Paper Details

Date Published: 10 February 2005
PDF: 4 pages
Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); doi: 10.1117/12.572611
Show Author Affiliations
Haihong Hou, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Kui Yi, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics, CAS (China)


Published in SPIE Proceedings Vol. 5638:
Optical Design and Testing II
Yongtian Wang; Zhicheng Weng; Shenghua Ye; Jose M. Sasian, Editor(s)

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