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Proceedings Paper

Multishot ablation of thin films: sensitive detection of film/substrate transition by shockwave monitoring
Author(s): Hans Eckard Hunger; Stefan Petzoldt; H. Pietsch; Juergen Reif; Eckart Matthias
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Paper Abstract

During multishot ablation with 248 nm excimer laser pulses for each single laser shot the shock wave emerging from the ablated material was monitored by the acoustic mirage effect. The shockwave parameters turned out to depend sensitively on the nature of the ablated material. In particular during ablation of a polymeric film/Si02/Si multilayer system distinct changes in the deflection signal were found when the ablation was driven through the interface between layers. Inspection by optical microscopy and depth profil ing was used as cross check. 1.

Paper Details

Date Published: 1 June 1991
PDF: 4 pages
Proc. SPIE 1441, Laser-Induced Damage in Optical Materials: 1990, (1 June 1991); doi: 10.1117/12.57223
Show Author Affiliations
Hans Eckard Hunger, Freie Univ. Berlin (Germany)
Stefan Petzoldt, Freie Univ. Berlin (Germany)
H. Pietsch, Freie Univ. Berlin (Germany)
Juergen Reif, Freie Univ. Berlin (Germany)
Eckart Matthias, Freie Univ. Berlin (Germany)


Published in SPIE Proceedings Vol. 1441:
Laser-Induced Damage in Optical Materials: 1990
Harold E. Bennett; Lloyd L. Chase; Arthur H. Guenther; Brian Emerson Newnam; M. J. Soileau, Editor(s)

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